| 摘要 |
PURPOSE: An atomic layer deposition apparatus for detecting the deformation of susceptor is provided to detect the deformation of susceptor and predict the life span of susceptor, by frequently inspecting the susceptor at the time of the loading and unloading of substrate. CONSTITUTION: An atomic layer deposition apparatus for detecting the deformation of susceptor includes a susceptor(20), a transfer module(40), and a sensor. The susceptor receives numerous substrates. The transfer module transfers the substrate to the susceptor. The sensor is provided in the transfer module, and measures the horizontality of susceptor surface.
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