Chemical bath deposition (CBD) apparatus

摘要

A chemical bath deposition (CBD) apparatus includes a first cap (11), a second cap (15), and a solution input/output device (12). The second cap (15) is arranged corresponding to the first cap (11) so as to form a deposition space (20). The solution input/output device (12) is located in the first cap (11) so as to feed a solution into/out of the deposition space (20). The position of the solution input/output device (12) is fixed, or the solution input/output device (12) is movable in the deposition space (20).