发明名称 MODIFIED MASK FOR PHOTOLITHOGRAPHY OF A WAFER WITH RECESS
摘要 A photolithography mask for a semiconductor wafer. The mask includes a protrusion section that protrudes from a handling section of the mask. An outer shape of the handling section enables handling by a mask aligner device. The protrusion includes a face surface provided at a level which is different from a face surface area of the handling section.
申请公布号 EP2603835(A2) 申请公布日期 2013.06.19
申请号 EP20110782672 申请日期 2011.08.10
申请人 DISCO CORPORATION 发明人 BIECK, FLORIAN
分类号 G03F1/38 主分类号 G03F1/38
代理机构 代理人
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