发明名称 TEXTURE-ETCHANT COMPOSITION FOR CRYSTALLINE SILICON WAFER AND METHOD FOR TEXTURE-ETCHING (1)
摘要 Disclosed herein is an etching composition for texturing a crystalline silicon wafer, comprising, based on a total amount of the composition: (A) 0.1 to 20 wt% of an alkaline compound; (B) 0.1 to 50 wt% of a cyclic compound having a boiling point of 100°C or more; (C) 0.00001 to 10 wt% of a silica-containing compound; and (D) residual water. The etching composition can maximize the absorbance of light of the surface of a crystalline silicon wafer.
申请公布号 EP2605289(A4) 申请公布日期 2013.06.19
申请号 EP20110816642 申请日期 2011.08.12
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 HONG, HYUNG-PYO;LEE, JAE-YOUN;LIM, DAE-SUNG
分类号 H01L31/0236;C09K13/00;H01L31/028 主分类号 H01L31/0236
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