IN-SITU ASSESSMENT METHOD AND SYSTEM IN MICRO-MACHINING BY LASER RAIL-ROADING TECHNIQUE

摘要

PURPOSE: A method and apparatus for evaluating a process in a laser railroad process are provided to improve a measurement speed by using reflected laser light. CONSTITUTION: A thin film(520) is laminated on a wafer(510). A process object(500) is formed on the wafer. A pattern is formed in the process object. The process object is cut down. The surface of the process object is tested by a micro-process method.