发明名称 Machine and process for sequential multi-sublayer deposition of copper indium gallium diselenide compound semiconductors
摘要 A method of manufacture of CIGS photovoltaic cells and modules involves sequential deposition of copper indium gallium diselenide compounds in multiple thin sublayers to form a composite CIGS absorber layer of a desirable thickness greater than the thickness of each sublayer. In an embodiment, the method is adapted to roll-to-roll processing of CIGS PV cells. In an embodiment, the method is adapted to preparation of a CIGS absorber layer having graded composition through the layer. In a particular embodiment, the graded composition is enriched in copper at a base of the layer. In an embodiment, each CIGS sublayer is deposited by co-evaporation of copper, indium, gallium, and selenium which react in-situ to form CIGS.
申请公布号 US8465589(B1) 申请公布日期 2013.06.18
申请号 US20100701449 申请日期 2010.02.05
申请人 NATH PREM;BASAVA VENUGOPALA R.;KALLA AJAY KUMAR;SHEVCHUK PETER ALEX;MISRA MOHAN S.;ASCENT SOLAR TECHNOLOGIES, INC. 发明人 NATH PREM;BASAVA VENUGOPALA R.;KALLA AJAY KUMAR;SHEVCHUK PETER ALEX;MISRA MOHAN S.
分类号 C23C16/00 主分类号 C23C16/00
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