| 摘要 |
<p>PURPOSE: A separation apparatus, a separation system, a separation method, and a computer storage medium are provided to easily delaminate an object substrate and a support substrate by using a transport device for moving a first and a second holding part in a horizontal direction. CONSTITUTION: A first holding part(110) maintains an object substrate(W). A second holding part(111) maintains a support substrate(S). A transport device(150) moves the second holding part and the support substrate in vertical and horizontal directions. The transport device includes a vertical transport part(151) and the horizontal transport part(152). A load measurement part(180) measures the load of the object substrate and the support substrate. A control part(350) controls the transport device based on the load measured by the load measurement part.</p> |
