发明名称 |
Measurement tool monitoring using fleet measurement precision and tool matching precision analysis |
摘要 |
A method for monitoring a fleet comprising a plurality of measurement tools includes collecting data for a current time interval from the fleet by a data collection module; and performing fleet measurement precision (FMP)/tool matching precision (TMP) analysis on the collected data by a FMP/TMP analysis module, wherein FMP/TMP analysis comprises determining a TMP for each of the plurality of measurement tools using a static and a dynamic benchmark measuring system (BMS); and determining a FMP for the fleet using the static and the dynamic BMS; and determining if the FMP is above a predetermined threshold by a fleet improvement module, and in the event the FMP is above the predetermined threshold, identifying at least one tool of the plurality of tools as poorly performing based on the TMPs; and flagging the identified at least one tool for improvement.
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申请公布号 |
US8467993(B2) |
申请公布日期 |
2013.06.18 |
申请号 |
US20100687145 |
申请日期 |
2010.01.14 |
申请人 |
ARCHIE CHARLES;BRENDLER ANDREW;SHNEYDER DMITRIY;SOLECKY ERIC;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ARCHIE CHARLES;BRENDLER ANDREW;SHNEYDER DMITRIY;SOLECKY ERIC |
分类号 |
G06F17/18;G06F19/00 |
主分类号 |
G06F17/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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