发明名称 Gold-free ohmic contacts
摘要 A semiconductor structure is provided having: a semiconductor; a gold-free electrically conductive structure in ohmic contact with the semiconductor; and a pair of electrically conductive layers separated by a layer of silicon. The structure includes: a refractory metal layer disposed in contact with the semiconductor; and wherein one of the pair of electrically conductive layers separated by the layer of silicon is the refractory metal layer. A second layer of silicon is disposed on a second one of the pair of pair of electrically conductive layers and including a third electrically conducive layer on the second layer of silicon. In one embodiment, the semiconductor includes a III-V material.
申请公布号 US8466555(B2) 申请公布日期 2013.06.18
申请号 US201113152481 申请日期 2011.06.03
申请人 CHELAKARA RAM V.;KAZIOR THOMAS E.;LAROCHE JEFFREY R.;RAYTHEON COMPANY 发明人 CHELAKARA RAM V.;KAZIOR THOMAS E.;LAROCHE JEFFREY R.
分类号 H01L23/48 主分类号 H01L23/48
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