发明名称 Film forming apparatus and method of forming film
摘要 A temperature adjustment unit is provided to a chamber for accommodating a stage, a discharge head, and a maintenance device. The temperature adjustment unit adjusts the temperature of the maintenance area at least while the transport device has the discharge head positioned in the maintenance area to be equal to or greater than the temperature of the drawing area while the transport device has the discharge head positioned in the drawing area.
申请公布号 US8464652(B2) 申请公布日期 2013.06.18
申请号 US20100757633 申请日期 2010.04.09
申请人 KASUGA OSAMU;SEIKO EPSON CORPORATION 发明人 KASUGA OSAMU
分类号 B05C5/02;B41J2/165 主分类号 B05C5/02
代理机构 代理人
主权项
地址