| 摘要 |
<p>PURPOSE: A substrate transfer guide device is provided to minimize the damage of a guide roller due to the contact of the edge of a substrate with the guide surface of a guide roller. CONSTITUTION: Transfer axes(11) are arranged in parallel along the transfer path of a substrate(S). Transfer rollers(13) for supporting the bottom surface of the substrate are fixed to the transfer axes. A guide axis(14) is rotatable to a frame(12) in a vertical direction. A guide roller(15) is fixed to the guide axis. A power transmission unit(16) delivers the rotation power of the transfer axes to the guide axis.</p> |
