发明名称 Stepped retaining ring
摘要 A two part retaining ring is described. An rigid upper portion has an annular recess along its inner diameter. An annular wearable lower portion has an inner diameter, an annular extension defined by the inner diameter and a vertical wall that is perpendicular to a surface of the second portion and opposite to the inner diameter. The annular extension fits into the annular recess of the annular first portion. A bonding material is on the vertical wall of the annular second portion.
申请公布号 US8465345(B2) 申请公布日期 2013.06.18
申请号 US20100851480 申请日期 2010.08.05
申请人 VAN DER VEEN SHAUN;ZUNIGA STEVEN M.;APPLIED MATERIALS, INC. 发明人 VAN DER VEEN SHAUN;ZUNIGA STEVEN M.
分类号 B24B29/00 主分类号 B24B29/00
代理机构 代理人
主权项
地址