| 摘要 |
PURPOSE: A sensor for detecting a substrate is provided to prevent a wet liquid from remaining on a rotating member by using driving water. CONSTITUTION: A rotating member(300) is rotatably connected to a gap between a first and a second vertical member(110,120). A magnet(320) is mounted in the lower part of the rotating member. A magnetic sensor(170) senses the movement of the rotating member by the magnetic field detection of the magnet. A rotary body(200) passes through the first vertical member, the second vertical member, and the rotating member. A driving water supply hole is formed in the end surface of the rotator. The spray hole of the rotary body passes through the side of pillar and the driving water supply hole.
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