| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microlens array suited to high definition exposure and capable of highly accurately positioning each unit microlens array, when manufacturing a microlens array by laminating unit microlens arrays, and to provide a laminating method thereof. <P>SOLUTION: In planar view, a light-shielding film 20b on an undersurface of a lowermost unit microlens array 23-8 is present beneath an opening part 21 formed by lacking of a light-shielding film 20a on an upper surface of an uppermost unit microlens array 2-1, so that the whole surface in the planar view is light-shielded by both the films. This configuration can eliminate such a case that exposure light transmits an alignment area after the lamination and exposes the substrate to the light. When illuminating it with an epi-illumination camera, the light-shielding film 20b is present below an intermediate alignment mark 23-4, however, both are significantly spaced from each other, so that it is unlikely that the illumination light reflected by the light-shielding film 20b affects the reflection light of the alignment mark 23-4 and reduces the contrast. <P>COPYRIGHT: (C)2013,JPO&INPIT |
