| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce fluctuation in sensitivity characteristics. <P>SOLUTION: A solid-state image pickup element includes a pixel area having an effective pixel area and a non-effective pixel area other than the effective pixel area. After forming a color filter in each of pixels within the effective pixel area, a cover film made of one of an inorganic material and an organic material is formed in the effective pixel area and the non-effective pixel area, and a lens material layer made of the other of the inorganic material and the organic material is formed as a material of a microlens on the cover film in the effective pixel area. Then, exposure of the cover film is detected in etching with which the lens material layer is formed into a lens shape, thereby ending the etching. This invention is applicable, e.g., to a solid-state image pickup element. <P>COPYRIGHT: (C)2013,JPO&INPIT |
