发明名称 SINGLE-CRYSTAL GROWING APPARATUS
摘要 PURPOSE: An apparatus for growing single crystal is provided to constantly maintain the sublimation temperature of a raw material by controlling the distance between the outer surface of an insulating member and a turn formed by rotation of an induction heating coil. CONSTITUTION: A crucible(300) has an internal space for accommodating a raw material. A crucible cover(700) is mounted on the upper part of the crucible. A seed gad holder(100) is mounted on the lower part of the crucible cover. An insulating member(400) includes a first insulating material(410), a second insulating material(430), and a quartz tube(420). An induction heating coil(500) heats a raw material(600) by using high frequency current.
申请公布号 KR20130063676(A) 申请公布日期 2013.06.17
申请号 KR20110130163 申请日期 2011.12.07
申请人 DONG-EUI UNIVERSITY INDUSTRY-ACADEMIC COOPERATIONFOUNDATION 发明人 LEE, WON JAE;PARK, JONG HWI
分类号 C30B23/02;C30B29/36;H01L21/20 主分类号 C30B23/02
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