| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing device, in which a traveling speed of a film polishing material is kept constant after the initial recovery stage until the final recovery stage, a consumption of the film polishing material is made constant to suppress increase in a production cost, and a polishing quality is made uniform. <P>SOLUTION: The polishing device includes a polishing head including: a feed reel for rewinding and forwarding the film polishing material; a recovery reel for winding and recovering the film polishing material; and a backup roller arranged therebetween. The polishing head includes: an air motor for driving the recovery reel; and a drawing means arranged between the backup roller and the recovery reel. The drawing means comprises: a rotary driving roller to be rotated at a constant speed; and a one-way roller to be rotated while pressing the film polishing material to the rotary driving roller. <P>COPYRIGHT: (C)2013,JPO&INPIT |
