| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a driving device of a piezoelectric motor which drives the piezoelectric motor with stable torque even if a temperature changes, a driving method of the piezoelectric motor, an electronic component transportation device, an electronic component inspection device, a robot hand and a robot. <P>SOLUTION: A driving device 100 of a piezoelectric motor comprises: a piezoelectric motor 10 having a vibrator 1 including a piezoelectric element; a driving circuit 30 driving the piezoelectric motor 10; a matching circuit 40 matching impedance of the driving circuit 30 with impedance of the piezoelectric motor 10; and a temperature compensation capacitor 50. The temperature compensation capacitor 50 compensates a change in capacitance of the vibrator 1, piezoelectric element, due to a change in temperature. <P>COPYRIGHT: (C)2013,JPO&INPIT |
