| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate the time and effort required to determine parameters relating to hitless paths with respect to even-numbered mirrors and odd-numbered mirrors, by facilitating port switching control. <P>SOLUTION: An MEMS mirror device includes: a mirror; a first movable cantilever which has one end connected to one side of the mirror via a connection spring; second and third movable cantilevers which have one ends connected to the other side of the mirror via connection springs; fixed electrodes 107-1 to 107-3 disposed so as to be spaced from the first, second, and third movable cantilevers; and a control unit. The control unit includes: an arithmetic unit 1 which calculates a control variable U in response to a request designating a desired turning state of the mirror and calculates an application voltage V to the fixed electrodes 107-1 to 107-3 from the control variable U; and a voltage generator 3 which applies the application voltage V to the fixed electrodes 107-1 to 107-3. The control variable U is a function of the application voltage V and is a variable linearly proportional to displacements of the first, second, and third cantilevers. <P>COPYRIGHT: (C)2013,JPO&INPIT |
