发明名称 LASER BEAM MACHINING DEVICE, LASER BEAM MACHINING METHOD, AND INKJET HEAD SUBSTRATE
摘要 <P>PROBLEM TO BE SOLVED: To irradiate the surface of a workpiece with pulse laser beams at predetermined intervals while keeping the repetition frequency of a laser oscillator constant, and to attain high accuracy of laser beam machining. <P>SOLUTION: This laser beam machining device 100 includes the laser oscillator 4 emitting pulse laser beams at the constant repetition frequency, and a laser irradiation control mechanism 7 intercepting or transmitting pulse laser beams emitted by the laser oscillator 4, in pulse units. The laser beam machining device 100 also includes a control device 8 for controlling switching of interception/transmission of pulse laser beams in a laser irradiation control mechanism 7. The control device 8 obtains the irradiation cycle of pulse laser beams required to irradiate the surface of the workpiece with pulse laser beams 2 at predetermined intervals from the scanning speed of the pulse laser beams 2 on the surface of the workpiece. The control device 8 controls the laser irradiation control mechanism 7 to irradiate the surface of the workpiece with the pulse laser beams in the obtained irradiation cycle. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013119106(A) 申请公布日期 2013.06.17
申请号 JP20110268723 申请日期 2011.12.08
申请人 CANON INC 发明人 KURACHI KOSUKE
分类号 B23K26/06;B23K26/00;B23K26/08;B41J2/16;H01S3/00 主分类号 B23K26/06
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