发明名称 |
SINGLE-CRYSTAL GROWING APPARATUS |
摘要 |
PURPOSE: An apparatus for growing single crystal is provided to efficiently grow high quality single crystal by controlling the sublimation temperature of a raw material through the homogenous heat distribution of a crucible. CONSTITUTION: A crucible(300) has an internal space for accommodating a raw material. A crucible cover(700) is mounted on the upper part of the crucible. A seed gad holder(100) is mounted on the lower part of the crucible cover. A seed gad(200) is adhered to the lower part of the seed gad holder. An insulating member(400) surrounds the crucible. The insulating member includes a first insulating material(410), a second insulating material(430), and a quartz tube(420).
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申请公布号 |
KR20130063675(A) |
申请公布日期 |
2013.06.17 |
申请号 |
KR20110130162 |
申请日期 |
2011.12.07 |
申请人 |
DONG-EUI UNIVERSITY INDUSTRY-ACADEMIC COOPERATIONFOUNDATION |
发明人 |
LEE, WON JAE;PARK, JONG HWI |
分类号 |
C30B23/02;C30B29/36;H01L21/20 |
主分类号 |
C30B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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