APPARATUS AND METHODS TO REMOVE FILMS ON BEVEL EDGE AND BACKSIDE OF WAFER,申请号KR20137013815-传众专利搜索

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发明名称	APPARATUS AND METHODS TO REMOVE FILMS ON BEVEL EDGE AND BACKSIDE OF WAFER
摘要
申请公布号	KR20130064149(A)	申请公布日期	2013.06.17
申请号	KR20137013815	申请日期	2006.09.26
申请人	LAM RESEARCH CORPORATION	发明人	KIM, YUN SANG;BAILEY ANDREW D. III
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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