发明名称 PANEL CLEANING APPARATUS
摘要 PURPOSE: A panel cleaning apparatus is provided to prevent panel damage generated due to a manual operation by automatizing a cleaning process. CONSTITUTION: A stage(100) fixes a panel(10). A shaft(210) rotates and moves horizontally in the upper part of the panel. Cleaning pads(220) are attachable and detachable to/from the surface of the shaft. A support bar(110) for preventing the direct contact of the stage and the panel is installed in the upper part of the stage. An alignment pin(120) is protruded on the upper of the stage in order to arrange the position of the panel.
申请公布号 KR20130063745(A) 申请公布日期 2013.06.17
申请号 KR20110130272 申请日期 2011.12.07
申请人 SYSTEMS TECHNOLOGY INCORPORATED 发明人 PARK, SANG PIL;HAN, KYU YONG;YOU, DEA IL;JEON, EUN SU
分类号 H01L21/302 主分类号 H01L21/302
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