| 摘要 |
PURPOSE: A temperature control system of semiconductor manufacturing equipment for avoiding a dead zone is provided to maintain the constant temperature of refrigerant by using a chiller. CONSTITUTION: A main control unit(100) controls the temperature of a load within a manufacturing facility. The main control unit linearly controls voltage to supply a control output and a polarity signal. A polar conversion part(120) generates voltage or current according to the control output. The polar conversion part changes polarity according to the polarity signal. A thermoelectric module block part classifies thermoelectric module blocks into multiple groups. [Reference numerals] (100) Main control unit; (110) Dead zone computation unit; (111) Control range determination unit; (112) Output reconfiguration unit; (113) Control signal generation unit; (120) Polar conversion part; (AA) Refrigerant |
