| 摘要 |
PURPOSE: A refine furnace for polysilicon is provided to prevent damages to an ultrasonic oscillator due to degradation, and to improve the crystallization efficiency and purity of polysilicon. CONSTITUTION: A refine furnace for polysilicon(1) includes a tank(10), a crucible, a heating unit, a cooling unit(40), and an ultrasonic vibrator. The cooling unit includes a plurality of cooling plates which cools the bottom of the crucible. The ultrasonic vibrator vibrates the crucible using a coolant by oscillating ultrasonic waves. The cooling unit generates temperature deviation between cooling plates corresponding to the center part and the edge part of the crucible, and gradually cools the bottom of the crucible. The ultrasonic vibrator includes a first oscillating unit and a second oscillating unit. |
