| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe cleaning device cleaning a probe in a short time. <P>SOLUTION: This probe cleaning device includes: a probe connection part connected to a rear end part of the probe having a suction pipe and a discharge pipe; and a suction machine sucking a gas, removing dust from the gas, and discharging it. If a rear end part of the suction pipe and a gas suction side of the suction machine are connected, if a rear end part of the discharge pipe and a gas exhaust side of the suction machine are connected and if a tip part of the suction pipe and a tip side of the discharge pipe are connected, when cleaning the probe, a closed loop using the suction machine, the discharge pipe and the suction pipe is configured. If the closed loop is configured when cleaning the probe, the suction machine circulates a cleaning gas sent from a gas supply source in order of the discharge pipe, the suction pipe, and the suction machine. <P>COPYRIGHT: (C)2013,JPO&INPIT |
