摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor for preventing an undesired signal from being generated even when the weight of an oscillator is out of balance. <P>SOLUTION: The angular velocity sensor of this invention is provided with a cancel signal output circuit 35 for injecting a cancel signal which has a reverse polarity to and the same amplitude as an output signal outputted from the a differential amplifier 29 to a subsequent stage of one of a first charge amplifier 28a and a second charge amplifier 28b. <P>COPYRIGHT: (C)2013,JPO&INPIT |