| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card in which mismatching of impedance is reduced. <P>SOLUTION: The probe card includes a first base plate forming a first trace on one surface and having rigidity, a second base plate forming a second trace on one surface and having flexibility and a connection part connecting an end part of the first trace to an end part of the second trace on a facing part where the one-surface of the first base plate faces the one-surface of the second base plate. The width of the first trace is wider than the width of the second trace and is width corresponding to tolerance between the first base plate and the second base plate, or the width of the second trace is wider than the width of the first trace and is width corresponding to the tolerance between the first base plate and the second base plate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
