发明名称 ACRYLATE-BASED COMPOUNDS AND THE PHOTORESIST COMPOSITION COMPRISING THE SAME
摘要 The present invention relates to an acrylate-based compound that includes an organic acid having two or more acrylate groups and one or more phenolic acid structures in one molecule, and a photosensitive composition including the same. It is possible to shorten a developing time in a photolithography process without damaging photosensitivity by using the photosensitive composition according to the present invention.
申请公布号 KR101273140(B1) 申请公布日期 2013.06.17
申请号 KR20110120402 申请日期 2011.11.17
申请人 发明人
分类号 C07C69/92;C07C69/94;G03F7/027 主分类号 C07C69/92
代理机构 代理人
主权项
地址