发明名称 METHOD OF MANUFACTURING LIQUID EJECTING HEAD, METHOD OF MANUFACTURING LIQUID EJECTING APPARATUS AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
摘要 A method of manufacturing a liquid ejecting head includes forming a first electrode made of platinum, forming a buffer layer made of a compound having a pyrochlore structure that contains bismuth or platinum on the first electrode, forming an oxide layer made of an oxide containing bismuth on the buffer layer, forming a piezoelectric layer made of a compound having a perovskite structure that contains bismuth by burning the oxide layer, and forming a second electrode on the piezoelectric layer.
申请公布号 US2013145589(A1) 申请公布日期 2013.06.13
申请号 US201213707035 申请日期 2012.12.06
申请人 SEIKO EPSON CORPORATION;SEIKO EPSON CORPORATION 发明人 SAKAI TOMOHIRO
分类号 H01L41/22 主分类号 H01L41/22
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