| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate housing container capable of efficiently replacing gas by making the gas in the substrate housing container leak from a specified place when replacing the gas in the substrate housing container. <P>SOLUTION: The substrate housing container includes a container body which contains a precise substrate and has an on/off valve for gas purging on a bottom surface, a rectangular opening which is used to take the precise substrate in and out of the container body, and has a base at a one-end part of the bottom surface of the container body, a lid body for opening and closing the opening part, and a rectangular seal member which is interposed between the opening part and lid body and can elastically deform. When gas is supplied to the substrate housing container from outside to replace the inside gas, a collision amount of a seal gasket is controlled so that the gas leaks from at least a top part and the bottom part of a frame body of the seal gasket. <P>COPYRIGHT: (C)2013,JPO&INPIT |
