| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface inspection method capable of using an inspection recipe common in a plurality of surface inspection devices regardless of a difference in a spatial filter of each surface inspection device of the plurality of surface inspection devices. <P>SOLUTION: A surface inspection method includes: displaying a Fourier image opening part of a surface inspection device No.1 with n set to 1, and moving a spatial filter to an original point, and acquiring a reference stop pixel value at the position of the original point (steps 6001 to 6004); moving the spatial filter by a fixed movement amount for off-set calculation and calculating the movement amount from the original point, and if n=1, storing an off-set value, a movement amount, and a reference stop position of the surface inspection device No.1 (steps 6005 to 6008); executing the steps 6002 to 6007 and 6009 in order to perform processing of a surface inspection device No. 2 with n=n+1; and repeatedly executing the flow until n becomes equal to N, and calculating spatial filer movement amounts and movement amount coefficients of surface inspection devices No.3 to N by using the spatial filter movement amount and movement amount coefficient of the surface inspection deice No.1 as a reference, and storing the results. <P>COPYRIGHT: (C)2013,JPO&INPIT |
