发明名称 LAMINATED SHEET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE LAMINATED SHEET
摘要 The present invention provides a laminated sheet that can prevent the decrease in adhering strength of a resin composition layer and the deterioration in electrical reliability and in which a back grinding tape can be peeled from a plurality of semiconductor elements collectively after dicing. The laminated sheet has a back grinding tape in which a pressure-sensitive adhesive layer is formed on a base, and a resin composition layer that is provided on the pressure-sensitive adhesive layer of the back grinding tape, wherein the tensile modulus of the pressure-sensitive adhesive layer at 23° C. is 0.1 to 5.0 MPa, and the T-peeling strength between the pressure-sensitive adhesive layer and the resin composition layer is 0.1 to 5 N/20 mm at 23° C. and 300 mm/min.
申请公布号 US2013149842(A1) 申请公布日期 2013.06.13
申请号 US201213712707 申请日期 2012.12.12
申请人 NITTO DENKO CORPORATION;NITTO DENKO CORPORATION 发明人 SENZAI HIROYUKI;TANAKA SHUMPEI;MIZUNO KOJI
分类号 B32B3/30;H01L21/78 主分类号 B32B3/30
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