| 摘要 |
PURPOSE: A method for manufacturing a cylindrical sputtering target is provided to manufacture a cylindrical target at low temperatures and improved productivity. CONSTITUTION: A method for manufacturing a cylindrical sputtering target comprises the steps of: preparing metal billets(10), mounting the metal billets in an extrusion die(100), and pressing the metal billets with a mandrel and a press to extrude a cylindrical target from the inlet of the extrusion die. |
