| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a correction method of a measurement error with which, regarding an undetermined sign for which both plus and minus signs may be taken in a mathematical expression relating a test jig measured value and a reference jig estimated value, the sign can be determined appropriately. <P>SOLUTION: A correction method comprises the steps of: measuring a standard sample by mounting the sample on a test jig 10 and a reference jig 10s; determining a mathematical expression relating a measured value in the test jig 10 (test jig measured value) to an estimated value of a measured value in the reference jig 10s (reference jig estimated value) with excluding an undetermined sign; measuring a phase confirmation sample by mounting the sample on the test jig and the reference jig; calculating the reference jig estimated value of the phase confirmation sample with a mathematical expression assuming a combination of signs for the undetermined sign; calculating a sum of absolute values of phase differences between the test jig measured value and the reference jig estimated value of the phase confirmation sample of each port for each combination of signs; and calculating the reference jig estimated value from the test jig measured value of any electronic component with a mathematical expression of such a combination of signs as to minimize the sum. <P>COPYRIGHT: (C)2013,JPO&INPIT |
