发明名称 |
PRESSURE SENSOR HAVING A NANO STRUCTURE AND MANUFACTURING METHOD THEREOF |
摘要 |
<p>PURPOSE: A pressure sensor with a nanostructure and a manufacturing method thereof are provided to improve a response speed and the sensitivity of a sensor due to the nanostructure adhered to the surface of the sensor. CONSTITUTION: A pressure sensor(100) with a nanostructure comprises a substrate(110), a source electrode(120), a drain electrode(130), and flexible sensor layer(140). The source and the drain electrodes are arranged separately on the substrate on a predetermined distance. The flexible sensor layer is arranged on the source and drain electrodes. The nanostructure adhered to a surface of the flexible sensor layer includes a zigzagged portions of a nano size.</p> |
申请公布号 |
KR20130062587(A) |
申请公布日期 |
2013.06.13 |
申请号 |
KR20110128939 |
申请日期 |
2011.12.05 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
KIM, JIN SEOK;SUH JUN KYO FRANCIS;KANG, SUNG CHUL;LEE, JEONG HOON |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|