| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas concentration measuring device capable of decomposing and removing contamination of an optical system without changing optical characteristics of a window, a lens, etc. <P>SOLUTION: A gas concentration measuring device comprises: a light source section 1 comprising a laser 1a for outputting a laser beam and a light source section side optical element 2 on which the laser light is made incident; a light receiving section 4 comprising a light receiving section side optical element 3 and a light receiving element 4a for receiving a laser beam from the light receiving side optical element; a purge air supply source 15 that is arranged on at least one of the light source section side and the light receiving section side, and supplies air for purge; and an active oxygen generating section 18 that is provided corresponding to the purge air supply source, arranged near the light source side optical element or the light receiving section side optical element on the purge air supply source side, and generates active oxygen by performing predetermined processing for the air for purge. <P>COPYRIGHT: (C)2013,JPO&INPIT |
