| 摘要 |
A rotary stage having an integrated collet closure assembly includes: an actuating piston positioned in a piston housing; a drawbar configured to be moved axially depending on the position of the actuating piston to open and close the collet closure assembly, and rotationally by movement of a rotating shaft of the rotary stage; and a pair of thrust bearings provided between the actuating piston and the drawbar. The pair of thrust bearings acts as an interface between the actuating piston and the drawbar such that the drawbar rotates freely and the actuating piston and the piston housing remain stationary in a rotary direction.
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