发明名称 |
MICROFLUIDIC DEVICE AND METHOD USING DOUBLE ANODIC BONDING |
摘要 |
A microfluidic device for use with a microfluidic delivery system, such as an organic vapor jet printing device, includes a glass layer that is directly bonded to a microfabricated die and a metal plate via a double anodic bond. The double anodic bond is formed by forming a first anodic bond at an interface of the microfabricated die and the glass layer, and forming a second anodic bond at an interface of the metal plate and the glass layer, where the second anodic bond is formed using a voltage that is lower than the voltage used to form the first anodic bond. The second anodic bond is formed with the polarity of the voltage reversed with respect to the glass layer and the formation of the first anodic bond. The double anodic bond provides a sealed interface at both glass layer surfaces. The metal plate includes attachment features that allow removal of the microfluidic device from a fixture. |
申请公布号 |
WO2013043540(A3) |
申请公布日期 |
2013.06.13 |
申请号 |
WO2012US55758 |
申请日期 |
2012.09.17 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF MICHIGAN;UNIVERSAL DISPLAY CORPORATION |
发明人 |
FORREST, STEPHEN;MCGRAW, GREGORY;MOHAN, SIDDHARTH, HARIKRISHNA;PETERS, DIANE |
分类号 |
B41J2/045;B41J2/135 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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