发明名称 |
Excimer lamp comprises a discharge vessel including a discharge space, which contains xenon-containing filling gas that is produced with dielectric discharge excimer molecule, where the quartz glasses consist of hydrogen and chlorine |
摘要 |
<p>The excimer lamp comprises a discharge vessel including a discharge space (3), which contains xenon-containing filling gas that is produced with a dielectric discharge excimer molecule having an emission wavelength of 172 nm, where the discharge vessel consists of synthetically produced quartz glasses in a region of an emission window, and the quartz glasses contain hydroxyl groups (1100 wt.%-parts per million(ppm)). The quartz glasses of the emission window: are produced by a flame hydrolysis of silicon feedstock and direct glazing; and consist of hydrogen. The excimer lamp comprises a discharge vessel including a discharge space (3), which contains xenon-containing filling gas that is produced with a dielectric discharge excimer molecule having an emission wavelength of 172 nm, where the discharge vessel consists of synthetically produced quartz glasses in a region of an emission window, and the quartz glasses contain hydroxyl groups (1100 wt.%- parts per million(ppm)). The quartz glasses of the emission window: are produced by a flame hydrolysis of silicon feedstock and direct glazing; consist of hydrogen (less than 2 x 10 1> 6>molecule/cm 3>to 4 x 10 1> 7>molecule/cm 3>), chlorine (less than 0.1 wt.%-ppm), silicon hydride groups (less than 5 x 10 1> 6>molecule/cm 3>); and have a fictive temperature of 950[deg] C. Silicon-containing insert material is free from chlorine. The emission window has an initial transmission (T 0) during an irradiation with incoherent and continuous excimer radiation, and a transmission drop (delta v) at a maximum transmission loss (T v) during continuous radiation, where the delta vis greater than 0.95 x T 0.</p> |
申请公布号 |
DE102011120412(A1) |
申请公布日期 |
2013.06.13 |
申请号 |
DE201110120412 |
申请日期 |
2011.12.08 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG;HERAEUS NOBLELIGHT GMBH |
发明人 |
ARNOLD, ERICH;WITZKE, HANS-DIETER;NEUMANN, CHRISTIAN;SCHILLING, FRANZ-JOSEF;STAMMINGER, MARK;KUEHN, BODO;SCHREIBER, ANDREAS |
分类号 |
H01J65/04;C03C3/06;H01J61/30 |
主分类号 |
H01J65/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|