发明名称 |
OPTICAL PROXIMITY CORRECTION METHOD |
摘要 |
<p>An optical proximity correction (OPC) method. Parts not conforming to a rule in an original graph provided by a client are pre-processed so as to convert graphs of these parts into shapes that do conform to the rule; when OPC processing is then performed on the whole graph, any influence of an irregular graph on the OPC processing is thus prevented and the accuracy of same greatly improved.</p> |
申请公布号 |
WO2013082980(A1) |
申请公布日期 |
2013.06.13 |
申请号 |
WO2012CN83726 |
申请日期 |
2012.10.30 |
申请人 |
CSMC TECHNOLOGIES FAB2 CO., LTD. |
发明人 |
WANG, CHING-HENG;CHEN, JIE |
分类号 |
G03F1/36 |
主分类号 |
G03F1/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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