| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology for developing and modifying, at low cost, semiconductor integrated circuit testers that mount both analog processing and digital processing that have a cost advantage, because semiconductor devices to be tested by analog/digital mixed testers are undergoing an evolution within an extremely short period of time and sometimes a revision of a test module is required at such timing as when facility investment or development and improvement costs are collected. <P>SOLUTION: A test of an analog circuit is performed by an interface board 1 and a test sequence is transmitted from a digital tester 3 to the interface board 1. Since the test of the analog circuit is performed by the interface board 1 that can be developed and modified at a low TAT, facility investment and development/modification costs can be easily collected. Furthermore, since the test can be performed near DUTs, a phase rotation and noise inflow due to wiring can be suppressed, thereby allowing the analog circuit to be tested with high accuracy. <P>COPYRIGHT: (C)2013,JPO&INPIT |
