发明名称 THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF
摘要 A manufacturing method of a thin film transistor array substrate includes the following two steps: depositing a first metal layer on a substrate; and processing the first metal layer through coating photoresist, exposing, developing, etching, and stripping photoresist processes to form a light blocking metal portion and a lower electrode of a first storage capacitor simultaneously. With the manufacturing method of the present disclosure, the light blocking metal portion can protect components of TFTs from being exposed to strong light during the manufacturing process, which can improve a stability of the TFT.
申请公布号 US2013146876(A1) 申请公布日期 2013.06.13
申请号 US201113380900 申请日期 2011.12.13
申请人 QIN SHIJIAN;SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 QIN SHIJIAN
分类号 H01L33/08;H01L33/36 主分类号 H01L33/08
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