| 摘要 |
<p>An X-ray inspection apparatus (100) is provided with: an X-ray source (3), which radiates X-rays to a substrate (P); a shield wall (5), which is provided to cover a region above a base (1), said region including the X-ray source (3), and which blocks the X-rays; a substrate transfer section (2), which passes through the region covered with the shield wall (5), and which transfers the substrate (P); and an outer cover (6), which is provided outside of the shield wall (5), and covers the substrate transfer section (2). The outer cover (6) can be removed by being separated from the shield wall (5), while having the shield wall (5) remain attached to the base (1). Consequently, the X-ray shield member is prevented from being wasted at the time of replacing the outer cover, and degree of freedom in appearance design of the X-ray inspection apparatus (100) can be improved.</p> |
