发明名称 DISPLAY DEVICE, Cu ALLOY FILM FOR USE IN THE DISPLAY DEVICE, AND Cu ALLOY SPUTTERING TARGET
摘要 <p>Disclosed is a Cu alloy film for a display device that has high adhesion to a glass substrate while maintaining a low electric resistance characteristic of Cu-based materials. The Cu alloy film is wiring in direct contact with a glass substrate on a board and contains 0.1 to 10.0 atomic % in total of one or more elements selected from the group consisting of Ti, Al, and Mg. Also disclosed is a display device comprising a thin-film transistor that comprises the Cu alloy film. In a preferred embodiment of the display device, the thin-film transistor has a bottom gate-type structure, and a gate electrode and scanning lines in the thin-film transistor comprise the Cu alloy film and are in direct contact with the glass substrate.</p>
申请公布号 KR101274812(B1) 申请公布日期 2013.06.13
申请号 KR20117003250 申请日期 2009.08.14
申请人 发明人
分类号 C23C14/14;C23C14/34 主分类号 C23C14/14
代理机构 代理人
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