METHOD OF PREDICTING PROCESSING SHAPE, METHOD OF DETERMINING PROCESSING CONDITION, METHOD OF PREDICTING PROCESSING AMOUNT, SYSTEM OF PREDICTING PROCESSING SHAPE, SYSTEM OF DETERMINING PROCESSING CONDITION, PROCESSING SYSTEM, COMPUTER PROGRAM OF PREDICTING PROCESSING SHAPE, COMPUTER PROGRAM OF DETERMINING PROCESSING CONDITION, PROGRAM RECORDING MEDIUM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of predicting a processing shape capable of predicting a processing shape corresponding to a processing condition with accuracy when the processing condition is given.

SOLUTION: At a step S11, a model formula including a correction coefficient, that is a model formula of a processing shape determined so as to correspond to a predetermined processing condition, is produced. Next, at a step S12, a simple processing condition is set to perform processing. Next, at a step S13, a processing shape is measured. Then, at a step S14, the correction coefficient is identified so that the processing shape calculated by the model formula is similar to the processing shape actually obtained. Thereafter, the processing shape corresponding to the given processing condition is estimated by using the model formula identified at the step S15.

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