发明名称 SYSTEM AND METHOD FOR CLEANING GAS INJECTORS
摘要 An injector cleaning apparatus with a concentric dual flow introducer and a flow-dispersing injector seat along with a method of cleaning an injector. The concentric dual flow introducer has concentric cleaning fluid flowpaths configured to communicate with a central passage and a plurality of peripheral passages of a gas injector. The input-side injector engaging interface of the concentric dual flow introducer and the flow-dispersing injector seat each have a compressible sealing portion having compressibility sufficient to yield under fluid cleaning surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus along with resiliency sufficient to prevent abutment of the gas injector and a rigid facing portion of the input-side injector engaging interface and output-side injector engaging interface respectively.
申请公布号 US2013146095(A1) 申请公布日期 2013.06.13
申请号 US201213650429 申请日期 2012.10.12
申请人 LAM RESEARCH CORPORATION;LAM RESEARCH CORPORATION 发明人 AVOYAN ARMEN;LA CROIX CLIFF;SHIH HONG;RONNE ALLAN;DAUGHERTY JOHN;ZHOU CATHERINE
分类号 B08B9/032;B08B3/02 主分类号 B08B9/032
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