Silicon thin film solar cell manufacturing method and the Silicon thin film solar cell manufactured using the method

摘要

PURPOSE: A method for manufacturing a silicon thin film solar cell and the silicon thin film solar cell manufactured by the method are provided to reduce reflectivity by forming an aluminum oxide layer between a transparent substrate and an electrode layer. CONSTITUTION: An aluminum oxide layer is formed in a transparent substrate(S2). A first electrode layer is formed on the aluminum oxide layer(S3). A first antireflection layer is formed on the first electrode layer(S4). A silicon layer is formed on the first antireflection layer(S6). A second electrode layer is formed on the silicon layer(S8). [Reference numerals] (AA) Start; (BB) End; (S1) Prepare a substrate; (S2) Form an aluminum oxide layer; (S3) Form a first electrode layer; (S4) Form a first antireflection layer; (S5) Form a protective layer; (S6) Form a silicon layer; (S7) Form a second antireflection layer; (S8) Form a second electrode layer