MANUFACTURING APPARATUS FOR SOLAR CELL, SOLAR CELL, AND MANUFACTURING METHOD FOR SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To lower the manufacturing cost of a heterojunction solar cell.

SOLUTION: The manufacturing apparatus for solar cell includes: a substrate holder configured to hold a plurality of substrates in plane so that a first main surface and a second main surface of each of the substrates are both exposed; a pre-filming chamber in which a first film is formed on the first main surface of the substrate when the substrate holder is carried in to an anode electrode side; a post-filming chamber in which a second film is formed on the second main surface of the substrate when the substrate holder is carried in to the anode electrode side; a movement chamber connecting the pre-filming chamber and the post-filming chamber so as to convey the substrate holder from the pre-filming chamber to the post-filming chamber without opening the inside to the atmosphere; and a conveying mechanism which conveys the substrate holder along the first main surface at the major part of a conveyance path from the pre-filming chamber to the post-filming chamber without opening the inside to the atmosphere.

COPYRIGHT: (C)2013,JPO&INPIT