发明名称 SEMICONDUCTOR STRUCTURE
摘要 A semiconductor structure is provided. The semiconductor structure includes a substrate, at least two pads, a passivation layer, at least two under bump metallization (UBM) layers and at least two bumps. The pads are disposed adjacent to each other on the substrate along the first direction. The passivation layer covers the substrate and the peripheral upper surface of each pad to define an opening. Each of the openings defines an opening projection along the second direction. The opening projections are disposed adjacent to each other but not overlapping with each other. Furthermore, the first direction is perpendicular to the second direction. The UBM layers are disposed on the corresponding openings, and the bumps are respectively disposed on the corresponding UBM layers. With the above arrangements, the width of each bump of the semiconductor structure of the present invention could be widened without being limited by the bump pitch.
申请公布号 US2013147037(A1) 申请公布日期 2013.06.13
申请号 US201213671202 申请日期 2012.11.07
申请人 CHIPMOS TECHNOLOGIES INC.;CHIPMOS TECHNOLOGIES INC. 发明人 SHEN GENG-SHIN
分类号 H01L23/48 主分类号 H01L23/48
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